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PARK XE-HDM 原子力显微镜

品牌名称: SYTEST
品牌图片: SYTEST
PARK XE-HDM 原子力显微镜
价      格:

1.00

商品编号:

TP0000422 收藏

商品评分:

 (共 0 条评论)

运      费:

满¥100免运费

服      务:

由LabShop商城负责发货,并提供售后服务

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Park XE-HDM Specifications


System
Specification

Motorized XY stage

travels up to 150 mm × 150 mm, 1 µm repeatability

Motorized Z stage

~30 mm Z travel distance
~0.08 µm resolution, < 1 µm repeatability

Motorized Focus Stage

11 mm Z travel distance for on-axis optics

Sample Thickness Allowance

up to 20 mm

Full scan range Z run-out

< 2 nm,repeatability < 1 nm

COGNEX Pattern Recognition

pattern align resolution of 1/4 pixel



Scanner Performances

XY Scanner Range

100 µm × 100 µm (high voltage mode)
10 µm × 10 µm (low voltage mode)

Z Scanner Range

12 μm (high voltage mode)
1.7 μm (low voltage mode)

XY Scanner Resolution

1.5 nm (high voltage mode)
<0.2 nm (low voltage mode)

Z Scanner Resolution

< 0.2 nm



AFM and XY Stage
Control Electronics

Controller Processing Unit

600 MHz and 4800 MIPS

Signal ADC & DAC

16-bit, 500 kHz bandwidth, internal lock-in




Vibration, Acoustic Noise, and ESD Performances

Floor Vibration

< 0.5 µm/s (10 Hz to 200 Hz w/ Active Vibration Isolation System)

Acoustic Noise

>20 dB attenuation w/ Acoustic Enclosure



Facility Requirements

Room Temperature (Stand By)

10 °C ~ 40 °C


Room Temperature (Operating)

18 °C ~ 24 °C

Humidity

30% to 60% (not condensing)


Floor Vibration Level

VC-E (3 μm/sec)

Acoustic Noise

Below 65 dB

Pneumatics

Vacuum: -60 kPa

Power Supply Rating

100/120 V/ 208~240 V, single phase, 15 A (max)

Total Power Consumption

2 KW (typical)

Ground Resistance

Below 100 ohms



Dimensions in mm
& Weight in kg

Acoustic Enclosure

820 (w) × 920 (d) × 1460 (h)
600 kg approx. (incl. basic NX-HDM System)


Operator Working Space

2400 (w) × 2450 (d), minimum (dimension unit: mm)

Control Cabinet

800 (w) × 800 (d) × 1030 (h)
160 kg approx. (incl. controllers)


System Floor Space

1720 (w) × 920 (d)


Ceiling Height

2000 or more


https://www.parksystems.com/index.php/cn/products/industrial-afm/park-hdm/specifications


xe-hdm_20110708(1).pdf

https://www.parksystems.com/images/menu/products/nx-hdm/footprint.jpg

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